Stable integrated SiC-based microsystems: Heater/temperature sensor

it was an object of our work to make a stable integrated microsystem involving a microheater and a temperature sensor. Silicon carbide, a wide band gap semiconductor as well as Silicon-Carbide-on-insulator (SiCOI) compositions have been subjects of the study. Using a silicon carbide meander on a dielectric substrate as a basis, we have made SiC microheaters, fi om IO to 1000 microns in size, which are long-term operable in air with the heater unit temperature above 1000 degrees C. If was explored the possibility to make a surgical coagulator on the basis of a sapphire scalpel with several SiC microheaters, too.