Numerical investigation of heat transport and fluid flow during the seeding process of oxide Czochralski crystal growth Part 2: rotating seed

被引:11
|
作者
Tavakoli, M. H. [1 ]
Wilke, H.
机构
[1] Bu Ali Sina Univ, Dept Phys, Hamadan 65174, Iran
[2] IKZ, D-12489 Berlin, Germany
关键词
numerical modeling; heat transfer; fluid flow; Czochralski method;
D O I
10.1002/crat.200610890
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
In this paper, the role of seed rotation on the characteristics of the two-dimensional temperature and flow field in the oxide Czochralski crystal growth system has been studied numerically for the seeding process. Based on the finite element method, a set of two-dimensional quasi-steady state numerical simulations were carried out to analyze the seed-melt interface shape and heat transfer mechanism in a Czochralski furnace with different seed rotation rates: omega(seed) = 5-30 rpm. The results presented here demonstrate the important role played by the seed rotation for influencing the shape of the seed-melt interface during the seeding process. The seed-melt interface shape is quite sensitive to the convective heat transfer in the melt and gaseous domain. When the local flow close to the seed-melt interface is formed mainly due to the natural convection and the Marangoni effect, the interface becomes convex towards the melt. When the local flow under the seed-melt interface is of forced convection flow type (seed rotation), the interface becomes more concave towards the melt as the seed rotation rate (omega(seed)) is increased. A linear variation of the interface deflection with respect to the seed rotation rate has been found, too. (C) 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:688 / 698
页数:11
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