Device processing technology for free-space optical interconnect system

被引:0
|
作者
Oren, M [1 ]
McCarthy, A [1 ]
Tooley, F [1 ]
Laprise, AE [1 ]
Plant, D [1 ]
Kirk, A [1 ]
Lu, Y [1 ]
Zhao, J [1 ]
机构
[1] Heriot Watt Univ, Dept Phys, Edinburgh, Midlothian, Scotland
关键词
D O I
10.1109/ECTC.2001.927899
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A device processing technology was developed for fabricating arrays of detectors/modulators chips used in a free-space optical interconnect system. The arrays are fabricated onto a GaAs/AlGaAs multi quantum well (MQW) epitaxial layer having an in-plane anisotropic strain. The packaged module army consists of a strain inducing substrate onto which the GaAs epitaxial layer is transferred, and bonded to a Si CMOS driver by flip chip technology. The module is attached to a printed circuit board(PCB), and two such boards were mounted into a free space optical interconnect demonstration system.
引用
收藏
页码:886 / 889
页数:4
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