The Fabrication Method of High Height-to-Diameter Ratio Micro-Wineglass Resonators

被引：0
|
作者：
Xie, Jianbing [1 ]
Ren, Sen [1 ]
Shen, Qiang [1 ]
Chen, Lei [1 ]
Xie, Hui [1 ]
Yuan, Weizheng [1 ]
机构：
[1] Northwestern Polytech Univ, Key Lab Micro Nano Syst Aerosp, Minist Educ, POB 638,127 Youyi West Rd, Xian 710072, Shaanxi, Peoples R China
来源：
2018 IEEE 8TH INTERNATIONAL NANOELECTRONICS CONFERENCES (INEC) | 2018年
基金：
中国国家自然科学基金;
关键词：
Micro-Wineglass Resonators; Hemispherical Resonator Gyroscopes; Glassblowing; Height-to-Diameter Ratio; Thermal Decomposition;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents the fabrication of High Height-to-Diameter Ratio Micro-Wineglass Resonators using glassblowing with thermal decomposition process. CaCO3 is used as the thermal decomposition material in this process in this paper. A number of chips with 200 mu m deep cavities are fabricated and loaded with different doses of CaCO3. The experiment results show that, the 200 mu m deep cavity can blowing a glass spherical shell with the H/DR of 0.79, which is better than the 800 mu m deep cavity glassblowing process without thermal decomposition.
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页码：45 / 46
页数：2
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