The Fabrication Method of High Height-to-Diameter Ratio Micro-Wineglass Resonators

被引：0

作者：

Xie, Jianbing ^{[1
]}

Ren, Sen ^{[1
]}

Shen, Qiang ^{[1
]}

Chen, Lei ^{[1
]}

Xie, Hui ^{[1
]}

Yuan, Weizheng ^{[1
]}

机构：

[1] Northwestern Polytech Univ, Key Lab Micro Nano Syst Aerosp, Minist Educ, POB 638,127 Youyi West Rd, Xian 710072, Shaanxi, Peoples R China

来源：

2018 IEEE 8TH INTERNATIONAL NANOELECTRONICS CONFERENCES (INEC) | 2018年

基金：

中国国家自然科学基金;

关键词：

Micro-Wineglass Resonators; Hemispherical Resonator Gyroscopes; Glassblowing; Height-to-Diameter Ratio; Thermal Decomposition;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the fabrication of High Height-to-Diameter Ratio Micro-Wineglass Resonators using glassblowing with thermal decomposition process. CaCO3 is used as the thermal decomposition material in this process in this paper. A number of chips with 200 mu m deep cavities are fabricated and loaded with different doses of CaCO3. The experiment results show that, the 200 mu m deep cavity can blowing a glass spherical shell with the H/DR of 0.79, which is better than the 800 mu m deep cavity glassblowing process without thermal decomposition.

引用

页码：45 / 46

页数：2

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