Accurate FEM/BEM modeling of SAW devices coated with dielectric layers

被引：1

作者：

Kawaguchi, Masaya ^{[1
]}

Fukuura, Atsuomi ^{[2
]}

机构：

[1] Kyocera Corp, R&D Ctr, Kagoshima 8994312, Japan

[2] Kyocera Corp, R&D Ctr, Kyoto 6190237, Japan

来源：

2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6 | 2007年

关键词：

D O I：

10.1109/ULTSYM.2007.180

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

FENIMEM analysis technique, which is capable of analyzing SAW devices with dielectric coating layers, is presented. The resulting technique is based on the conventional Green function rather than its inverse. FEM part of the analysis deals with the free space region, dielectric layers, electrodes, and part of the substrate. Two approaches to treat the semi-infinite free space above the device structure are proposed. Numerical results are given for the frequency shift of SAW filters caused by SiO2 coating layer, and good agreement with experiments is observed.

引用

页码：698 / +

页数：2

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