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- [33] MASS-SPECTROMETRIC STUDIES OF THE NEUTRAL AND IONIC PRODUCTS IN A CH4/O2 MICROWAVE-DISCHARGE PLASMA JOURNAL OF PHYSICAL CHEMISTRY, 1993, 97 (44): : 11380 - 11384
- [34] Optical studies of a-C:H films deposited from CH4, CH4/He, CH4/Ar and CH4/N2 rf plasmas JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2000, 2 (01): : 43 - 52
- [40] Diagnostic of a RF (13.56MHz) Magnetron in Ar/CH4 Discharge LASER AND PLASMA APPLICATIONS IN MATERIALS SCIENCE, 2011, 227 : 195 - 199