A Method of Forming Full-Wheatstone Bridge for Linear TMR Magnetic Sensors

被引：1

作者：

Jiang, Dingsong ^{[1
,2
]}

Lu, Zhihong ^{[1
,2
]}

Chen, Mingming ^{[4
]}

Yang, Jianzhong ^{[1
,2
,3
]}

机构：

[1] Tsinghua Univ, Dept Precis Instrument, Beijing, Peoples R China

[2] Tsinghua Univ, State Key Lab Precis Measurement Technol & Instru, Beijing, Peoples R China

[3] Innovat Ctr Future Chips, Beijing, Peoples R China

[4] China Univ Geosci Beijing, Sch Engn & Technol, Beijing, Peoples R China

来源：

2021 5TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE (EDTM) | 2021年

关键词：

Magnetic sensors; Full-Wheatstone bridge; TMR and MTJ;

D O I：

10.1109/EDTM50988.2021.9420900

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The tunneling magnetoresistance (TMR) magnetic sensor is usually fabricated with a full-Wheatstone bridge structure, to obtain stable and linear output. However, its manufacturing process is complex at present. Aim to facilitate the large-scale industrial production, a novel and concise method of forming a full-Wheatstone bridge TMR magnetic sensor is introduced. Both simulations and experimental results prove the feasibility of this method.

引用

页数：3