A Method of Forming Full-Wheatstone Bridge for Linear TMR Magnetic Sensors

被引:1
|
作者
Jiang, Dingsong [1 ,2 ]
Lu, Zhihong [1 ,2 ]
Chen, Mingming [4 ]
Yang, Jianzhong [1 ,2 ,3 ]
机构
[1] Tsinghua Univ, Dept Precis Instrument, Beijing, Peoples R China
[2] Tsinghua Univ, State Key Lab Precis Measurement Technol & Instru, Beijing, Peoples R China
[3] Innovat Ctr Future Chips, Beijing, Peoples R China
[4] China Univ Geosci Beijing, Sch Engn & Technol, Beijing, Peoples R China
关键词
Magnetic sensors; Full-Wheatstone bridge; TMR and MTJ;
D O I
10.1109/EDTM50988.2021.9420900
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The tunneling magnetoresistance (TMR) magnetic sensor is usually fabricated with a full-Wheatstone bridge structure, to obtain stable and linear output. However, its manufacturing process is complex at present. Aim to facilitate the large-scale industrial production, a novel and concise method of forming a full-Wheatstone bridge TMR magnetic sensor is introduced. Both simulations and experimental results prove the feasibility of this method.
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页数:3
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