Advances in computational design and optimization with application to MEMS

In this paper, we will highlight the current research which employs the topology optimization to find the optimal configuration of various smart structures and microstructures, specifically, pressure actuated compliant mechanisms, flextensional transducers, and porous material microstructures with unusual thermoelastic properties. These examples demonstrate that the topology optimization problem involving multiple physics domain is a viable direction for future research, in particular, for sensor and actuator design. Copyright (C) 2001 John Wiley & Sons, Ltd.