Micro-hole drilling on silicon nitride in ethanol

被引：0

作者：

Yamabe, T. ^{[1
]}

Matsuda, H. ^{[1
]}

Enomoto, Y. ^{[1
]}

Kawamura, T. ^{[1
]}

Kim, I. S. ^{[1
]}

Hibi, Y.

机构：

[1] Shinshu Univ, Fac Text Sci & Technol, Matsumoto, Nagano, Japan

来源：

RESEARCHES AND PROGRESSES OF MODERN TECHNOLOGY ON SILK, TEXTILE AND MECHANICALS II | 2007年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

There are growing industrial needs of micro-drilling of engineering ceramics. Among the ceramics, little study was conducted on micro-drilling on silicon nitride. In the present study, micro drilling on two kinds of silicon nitride with different kinds of additives (Si3N4+ Y2O3 and Si3N4+ Al2O3) were, made in ethanol as the cutting fluid. The condition of the spindle rotational speed and the feed rate was clarified for safely drilling. The life of the diamond-coated drill is longer for Si3N4+ Y2O3 than for Si3N4+ Al2O3; referred to SiN-W, and SiN-B respectively. It is suggested that tribo-chemical reaction product; silicon alcoxide may effectively protect the damage of the drill point for SiN-W.

引用

页码：119 / +

页数：2

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