Micro-hole drilling on silicon nitride in ethanol

被引：0
|
作者：
Yamabe, T. [1 ]
Matsuda, H. [1 ]
Enomoto, Y. [1 ]
Kawamura, T. [1 ]
Kim, I. S. [1 ]
Hibi, Y.
机构：
[1] Shinshu Univ, Fac Text Sci & Technol, Matsumoto, Nagano, Japan
来源：
RESEARCHES AND PROGRESSES OF MODERN TECHNOLOGY ON SILK, TEXTILE AND MECHANICALS II | 2007年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
There are growing industrial needs of micro-drilling of engineering ceramics. Among the ceramics, little study was conducted on micro-drilling on silicon nitride. In the present study, micro drilling on two kinds of silicon nitride with different kinds of additives (Si3N4+ Y2O3 and Si3N4+ Al2O3) were, made in ethanol as the cutting fluid. The condition of the spindle rotational speed and the feed rate was clarified for safely drilling. The life of the diamond-coated drill is longer for Si3N4+ Y2O3 than for Si3N4+ Al2O3; referred to SiN-W, and SiN-B respectively. It is suggested that tribo-chemical reaction product; silicon alcoxide may effectively protect the damage of the drill point for SiN-W.
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收藏
页码：119 / +
页数：2
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