Simulation of BAW resonators frequency adjustment

被引：12
|
作者：
Reinhardt, Alexandre [1 ]
Buffet, Nicolas [1 ]
Shirakawa, Alexandre [1 ]
David, Jean Baptiste [1 ]
Parat, Guy [1 ]
Aid, Marc [1 ]
Joblot, Sylvain [2 ]
Ancey, Pascal [2 ]
机构：
[1] CEA Leti Minatec, Grenoble, France
[2] ST Microelect R&D, Design & Ind Ctr, Crolles, France
来源：
2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6 | 2007年
关键词：
D O I：
10.1109/ULTSYM.2007.363
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
A theoretical approach of the frequency trimming of BAW filters is presented. We discuss the way to integrate this step already in the design stage by considering the frequency adjustment of worst cases. In particular, we show that the frequency trimming puts some requirements on the acoustical design of resonators. We also discuss the limits of this adjustment, and evaluate on an example the minimum dispersion that cannot be suppressed.
引用
收藏
页码：1444 / +
页数：2
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