Differential method of instrument resolution enhancement

被引:0
|
作者
Kuryshev, GL [1 ]
Polovinkin, VG [1 ]
机构
[1] Russian Acad Sci, Inst Semicond Phys, SB, Novosibirsk 630090, Russia
关键词
signal processing; applications; resolution enhancement; interface state density;
D O I
暂无
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
A simple method for solving the integral equation of convolution type is proposed. The method is based on representation of the solving procedure as a series of differential operators. Discussion is based on the problem of determining the density of interface states of Metal-Insulator-Semiconductor (MIS) structures from high-frequency or quasi - static Capacitance - Voltage characteristics. The dependence of the obtained energy resolution on the number of the series terms taken into account and the required accuracy of the original data are discussed.
引用
收藏
页码:45 / 47
页数:3
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