Challenges in commercializing MEMS

被引：11
|
作者：
Peeters, E
机构：
[1] Xerox Corp, Palo Alto
来源：
IEEE COMPUTATIONAL SCIENCE & ENGINEERING | 1997年 / 4卷 / 01期
关键词：
D O I：
10.1109/99.590855
中图分类号：
TP301 [理论、方法];
学科分类号：
081202 ;
摘要：
Several microelectromechanical systems have achieved commercial success. The barriers can still be formidable, though, and the path to success is often much different for MEMS than it was for mainstream semiconductors. Maturing software for comprehensive modeling and design will help in the future.
引用
收藏
页码：44 / 48
页数：5
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