Probing systems for micro and nano metrology

被引：2
|
作者：
Hoffmann, Joerg [1 ]
机构：
[1] Univ Erlangen Nurnberg, Lehrstuhl QFM, D-91052 Erlangen, Germany
来源：
TM-TECHNISCHES MESSEN | 2008年 / 75卷 / 05期
关键词：
geometrical micro and nano metrology; probing; multisensor systems;
D O I：
10.1524/teme.2008.0873
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The detection of the surface of a specimen, or selected points on it with the help of probing systems is fundamental for each dimensional measurement. Especially in the field of micro and nano metrology a universal probing system capable for at least a number of different measurement tasks is lacking. Systems based on optical, tactile, electrical, and other interactions with the surface to be probed are available today. The article gives an overview about the state of the art and challenges in nanometer-resolved surface detection.
引用
收藏
页码：311 / 317
页数：7
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