Polymer microring resonators for high-frequency ultrasound detection and imaging

被引:73
|
作者
Maxwell, Adam [1 ]
Huang, Sheng-Wen [2 ]
Ling, Tao [1 ]
Kim, Jin-Sung [1 ]
Ashkenazi, Shai [2 ]
Guo, L. Jay [1 ]
机构
[1] Univ Michigan, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA
[2] Univ Michigan, Dept Biomed Engn, Ann Arbor, MI 48109 USA
关键词
acoustic detectors; acoustic devices; microresonators; optical resonance; optical resonators; optical strip waveguides; optical waveguides; optical waveguide components; ultrasound detector;
D O I
10.1109/JSTQE.2007.914047
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Polymer microring resonators fabricated by nanoimprinting are presented as a means of ultrasound detection. Acoustic waves impinging on a ring-shaped optical resonator cause strain in the ring dimensions, modulating optical output. Basic acoustic and optical characteristics of the microring sensor are presented. Measurements at several frequencies show a high sensitivity and low noise-equivalent pressure. The angular response is determined by sensing the optoacoustic excitation of a 49 mu m polyester microsphere and shows wide-angle sensitivity. A 1-D array consisting of four microrings is demonstrated using wavelength multiplexing for addressing each element. The high sensitivity, bandwidth, and angular response make it a potentially useful sensor platform for many applications including high-frequency ultrasonic and photoacoustic imaging.
引用
收藏
页码:191 / 197
页数:7
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