Polymer microring resonators for high sensitivity, broadband, wide-directivity ultrasound detection and high-resolution imaging

被引:0
|
作者
Chen, Sung-Liang [1 ]
Ling, Tao [1 ]
Guo, L. Jay [1 ]
机构
[1] Univ Michigan, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA
关键词
Optical resonators; ultrasound detectors; broadband; high sensitivity; small size; photoacoustic imaging; photoacoustic tomography; photoacoustic microscopy; THERMOACOUSTIC TOMOGRAPHY; PHOTOACOUSTIC TOMOGRAPHY; FILM; SENSOR; ROUGHNESS; BRAIN;
D O I
10.1117/12.916162
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Optical detection of ultrasound is an emerging technique based on the interaction of strain field and optical field, modulating the optical properties of the resonance cavity for sensitive detection. Such a detection scheme can have several unique advantages, such as broadband response and size-independent sensitivity, compared with conventional piezoelectric transducers. Detector's high sensitivity is essential for deep penetration depth, especially for high-resolution imaging because of the strong attenuation of high-frequency ultrasound. Besides, small element size has the advantage of realizing wide acceptance angle of ultrasound detection. Previously we have demonstrated optical-based ultrasound detectors using polymer microring resonators, showing flat spectral response from dc to high frequency, over 90 MHz at -3-dB. By improving the fabrication process, we are able to achieve a new generation device with higher sensitivity and smaller element size. An ultralow noise-equivalent pressure of 21.4 Pa over 1-75 MHz range has been achieved using a fabricated detector of 60 mu m diameter. We will mainly demonstrate its applications to photoacoustic imaging, including photoacoustic computed tomography and photoacoustic microscopy. The new generation device can also be applied to other ultrasound-related imaging and detection.
引用
收藏
页数:12
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