Highly efficient blazed grating with multilayer coating for tender X-ray energies

被引：36

作者：

Senf, F. ^{[1
]}

Bijkerk, F. ^{[2
]}

Eggenstein, F. ^{[1
]}

Gwalt, G. ^{[1
]}

Huang, Q. ^{[3
]}

Kruijs, R. ^{[2
]}

Kutz, O. ^{[4
]}

Lemke, S. ^{[4
]}

Louis, E. ^{[2
]}

Mertin, M. ^{[1
]}

Packe, I. ^{[1
]}

Rudolph, I. ^{[1
]}

Schaefers, F. ^{[1
]}

Siewert, F. ^{[1
]}

Sokolov, A. ^{[1
]}

Sturm, J. M. ^{[2
]}

Waberski, Ch. ^{[4
]}

Wang, Z. ^{[3
]}

Wolf, J. ^{[4
]}

Zeschke, T. ^{[1
]}

Erko, A. ^{[1
]}

机构：

[1] HZB, Inst Nanometer Opt & Technol, Albert Einstein Str 15, D-12489 Berlin, Germany

[2] Univ Twente, XUV Opt Grp, MESA Inst Nanotechnol, NL-7522 ND Enschede, Netherlands

[3] Tongji Univ, Sch Phys Sci & Engn, Key Lab Adv Microstruct Mat MOE, Inst Precis Opt Engn, Shanghai 200092, Peoples R China

[4] HZB, Precis Gratings Dept, Albert Einstein Str 15, D-12489 Berlin, Germany

来源：

OPTICS EXPRESS | 2016年 / 24卷 / 12期

关键词：

DIFFRACTION EFFICIENCY; MONOCHROMATORS; ENHANCEMENT; FILMS;

D O I：

10.1364/OE.24.013220

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

For photon energies of 1 - 5 keV, blazed gratings with multilayer coating are ideally suited for the suppression of stray and higher orders light in grating monochromators. We developed and characterized a blazed 2000 lines/mm grating coated with a 20 period Cr/C- multilayer. The multilayer d-spacing of 7.3 nm has been adapted to the line distance of 500 nm and the blaze angle of 0.84 degrees in order to provide highest efficiency in the photon energy range between 1.5 keV and 3 keV. Efficiency of the multilayer grating as well as the reflectance of a witness multilayer which were coated simultaneously have been measured. An efficiency of 35% was measured at 2 keV while a maximum efficiency of 55% was achieved at 4 keV. In addition, a strong suppression of higher orders was observed which makes blazed multilayer gratings a favorable dispersing element also for the low X-ray energy range. (C)2016 Optical Society of America

引用

页码：13220 / 13230

页数：11

共 50 条

[1] Optimized highly efficient multilayer-coated blazed gratings for the tender X-ray region
Sokolov, Andrey
Huang, Qiushi
Senf, Friedmar
Feng, Jiangtao
Lemke, Stephanie
Alimov, Svyatoslav
Knedel, Jeniffa
Zeschke, Thomas
Kutz, Oliver
Seliger, Tino
Gwalt, Grzegorz
Schaefers, Franz
Siewert, Frank
Kozhevnikov, Igor, V
Qi, Runze
Zhang, Zhong
Li, Wenbin
Wang, Zhanshan
OPTICS EXPRESS, 2019, 27 (12) : 16833 - 16846
[2] Theoretical analysis and optimization of highly efficient multilayer-coated blazed gratings with high fix-focus constant for the tender X-ray region
Huang, Qiushi
Kozhevnikov, Igor, V
Sokolov, Andrey
Zhuang, Yeqi
Li, Tongzhou
Feng, Jiangtao
Siewert, Frank
Viefhaus, Jens
Zhang, Zhong
Wang, Zhanshan
OPTICS EXPRESS, 2020, 28 (02): : 821 - 845
[3] High-order multilayer-coated blazed grating for a high-transmission and high-resolution tender X-ray monochromator/spectrometer
YEQI ZHUANG
QIUSHI HUANG
ANDREY SOKOLOV
STEPHANIE LEMKE
ZHENGKUN LIU
YUE YU
IGOR VKOZHEVNIKOV
RUNZE QI
ZHE ZHANG
ZHONG ZHANG
JENS VIEFHAUS
ZHANSHAN WANG
Photonics Research, 2025, 13 (02) : 340 - 350
[4] High-order multilayer-coated blazed grating for a high-transmission and high-resolution tender X-ray monochromator/spectrometer
Zhuang, Yeqi
Huang, Qiushi
Sokolov, Andrey
Lemke, Stephanie
Liu, Zhengkun
Yu, Yue
Kozhevnikov, Igor V.
Qi, Runze
Zhang, Zhe
Zhang, Zhong
Viefhaus, Jens
Wang, Zhanshan
PHOTONICS RESEARCH, 2025, 13 (02) : 340 - 350
[5] Spectromicroscopy of Nanoscale Materials in the Tender X-Ray Regime Enabled by a High Efficient Multilayer-Based Grating Monochromator
Werner, Stephan
Guttmann, Peter
Siewert, Frank
Sokolov, Andrey
Mast, Matthias
Huang, Qiushi
Feng, Yufei
Li, Tongzhou
Senf, Friedmar
Follath, Rolf
Liao, Zhohngquan
Kutukova, Kristina
Zhang, Jian
Feng, Xinliang
Wang, Zhan-Shan
Zschech, Ehrenfried
Schneider, Gerd
SMALL METHODS, 2023, 7 (01)
[6] A Soft X-ray Spectrometer using a Highly Dispersive Multilayer Grating
Warwick, Tony
Padmore, Howard
Voronov, Dmitriy
Yashchuk, Valeriy
SRI 2009: THE 10TH INTERNATIONAL CONFERENCE ON SYNCHROTRON RADIATION INSTRUMENTATION, 2010, 1234 : 776 - 780
[7] THE X-RAY EFFICIENCY OF REPLICAS OF A MASTER BLAZED REFLECTION GRATING
DENBOGGENDE, AJF
NEVIERE, M
VIDELER, PH
DEKORTE, PAJ
BRINKMAN, AC
KAHN, SM
X-RAY INSTRUMENTATION IN MEDICINE AND BIOLOGY, PLASMA PHYSICS, ASTROPHYSICS, AND SYNCHROTRON RADIATION, 1989, 1140 : 533 - 541
[8] Refraction effects in soft x-ray multilayer blazed gratings
Voronov, D. L.
Salmassi, F.
Meyer-Ilse, J.
Gullikson, E. M.
Warwick, T.
Padmore, H. A.
OPTICS EXPRESS, 2016, 24 (11): : 1334 - 1344
[9] VERY HIGH X-RAY EFFICIENCY FROM A BLAZED GRATING
CASH, W
KOHNERT, R
APPLIED OPTICS, 1982, 21 (01): : 17 - 18
[10] Tender X-ray beam splitting with high efficiency by use of multilayer grating based on conical diffraction
Du, Liangliang
Meng, Limin
An, Ran
Ye, Yan
SECOND TARGET RECOGNITION AND ARTIFICIAL INTELLIGENCE SUMMIT FORUM, 2020, 11427

← 1 2 3 4 5 →