Vibration mode analysis of piezoelectric-ceramic cylinder vibratory gyroscopes with interdigital electrodes

被引：2
|
作者：
Abe, H [1 ]
Yoshida, T [1 ]
Nakamura, K [1 ]
机构：
[1] TOHOKU UNIV,FAC ENGN,SENDAI,MIYAGI 980,JAPAN
来源：
ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS | 1996年 / 79卷 / 07期
关键词：
angular velocity sensor; bending mode; vibratory gyroscope; piezoelectric resonator; piezoelectric ceramics;
D O I：
10.1002/ecjb.4420790706
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Using the deviation of vibration mode axes from their ideal positions, an equivalent circuit is introduced for bending mode-based cylindrical piezoelectric ceramic vibratory gyroscopes which have interdigital electrodes for both driving and detection. By comparing experimentally determined impedance characteristics with numerically simulated impedance characteristics, it is possible to estimate shifts in a vibration mode axis of a resonator. Furthermore, it is possible to design a high-performance vibratory gyroscope that produces no output voltage even when it is not subjected to an angular velocity by degenerating two vibratory modes. This degeneracy can be induced by laser machining a groove at the high-frequency vibration mode axis.
引用
收藏
页码：53 / 60
页数：8
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