Investigation of the optical and electro-optical properties of hexagonal boron nitride thin films deposited by PECVD technique

被引：9
|
作者：
El-Yadouni, A
Soltani, A
Boudrioua, A
Thevenin, P
Bath, A
Loulergue, JC
机构：
[1] Univ Metz, CLOES, MOPS, F-57070 Metz, France
[2] Supelec, F-57070 Metz, France
来源：
OPTICAL MATERIALS | 2001年 / 17卷 / 1-2期
关键词：
waveguides; thin films; electro-optic; boron nitride;
D O I：
10.1016/S0925-3467(01)00098-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Thin films of hexagonal boron nitride (h-BN) are deposited on glass-ITO substrates by a plasma enhanced chemical vapour deposition (PECVD) process. Investigations of guiding and optical properties of films are performed by using nl-lines spectroscopy. Ordinary and extraordinary refractive indices and the optical anisotropy are determined from TE and TM mode excitations. Electro-optic characterisation is performed using the guided mode angular shift technique. (C) 2001 Elsevier Science B.V. All rights reserved.
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页码：319 / 322
页数：4
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