FASTC2D:: Software for extracting 2D carrier profiles from scanning capacitance microscopy images

被引：0
|
作者：
Rennex, BG [1 ]
Kopanski, JJ [1 ]
Marchiando, JF [1 ]
机构：
[1] NIST, Div Semicond Elect, Gaithersburg, MD 20899 USA
来源：
CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2000, INTERNATIONAL CONFERENCE | 2001年 / 550卷
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
FASTC2D is a Windows based computer program for conversion of two-dimensional (2D) scanning capacitance microscope (SCM) images of doped silicon into 2D carrier profiles. It utilizes interactive, user-friendly software to allow a user to enter electrical and measurement parameters, to model the tip, and to navigate among the various choices for calculation and analysis. It achieves fast carrier profile extraction using interpolation on a rigorous database of theoretical SCM response calculated off-line.
引用
收藏
页码：635 / 640
页数：4
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