共 50 条
- [27] BILEVEL HIGH-RESOLUTION PHOTOLITHOGRAPHIC TECHNIQUE FOR USE WITH WAFERS WITH STEPPED AND-OR REFLECTING SURFACES JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1977 - 1979
- [28] Controlling Frost Propagation on Polymeric Surfaces Using SI-ATRP Chemical Micropatterning ADVANCED MATERIALS INTERFACES, 2025,
- [29] An accelerated testing technique for evaluating performance of chemical air filters for DUV photolithographic equipment METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XIII, PTS 1 AND 2, 1999, 3677 : 857 - 865
- [30] Molecular design and chemical modification of semiconductor surfaces ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2018, 255