A High Accuracy Resonant Pressure Sensor with Lateral Driven and Piezoresistive Detection

A novel structure of resonant pressure sensor with integrated comb is presented with the electrostatic drive and piezoresistive detection. This design realizes double symmetric 'H' beams assembled in one pressure diaphragm to realize symmetric-lateral vibration. When a pressure applied, the Z-direction offset between fixed and movable combs is less than 0.2 m, which is beneficial for close-loop control. The novel structure combined with piezoresistive detection and coupling beam is presented, which can obtain pure tensile stress or compressive stress on the detection beam with low noise, adjacent modal output will be easy to filter. The simulated sensor non-linearity after polynomial fitting is less than 0.01%FS with the pressure range of 0-300 kPa, and its measuring sensitivity is up to -25 Hz/kPa.