GaInAsP/InP membrane buried heterostructure distributed feedback laser with air-bridge structure

被引:12
|
作者
Naitoh, Hideyuki [1 ]
Sakamoto, Shinichi [1 ]
Ohtake, Mamoru [1 ]
Okumura, Tadashi [1 ]
Maruyama, Takeo [1 ,3 ]
Nishiyama, Nobuhiko [2 ]
Arai, Shigehisa [1 ,3 ]
机构
[1] Tokyo Inst Technol, Quantum Nanoelect Res Ctr, Meguro Ku, Tokyo 1528552, Japan
[2] Tokyo Inst Technol, Dept Elect & Elect Engn, Meguro Ku, Tokyo 1528552, Japan
[3] Japan Sci & Technol Agcy, Kawaguchi Ctr Bldg, CREST, Kawaguchi, Saitama 3320012, Japan
关键词
GaInAsP/InP; DFB laser; membrane laser; air-bridge structure; high optical confinement;
D O I
10.1143/JJAP.46.L1158
中图分类号
O59 [应用物理学];
学科分类号
摘要
We fabricated a membrane buried heterostructure distributed feedback (BH-DFB) laser with an air-bridge structure by selectively etching a sacrificial layer. A continuous wave (CW) operation under optical pumping was attained from 10 up to 80 degrees C, and a minimum threshold pump power of 4.3 mW was obtained at 20 degrees C. From the pump-power dependence of the lasing wavelength. the thermal resistance of this air-bridge membrane structured was estimated to be 11 K/mW, which is approximately half that of a previously reported structure (23 K/mW) fabricated by direct wafer bonding on another InP substrate.
引用
收藏
页码:L1158 / L1160
页数:3
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