Development of scanning probe microscope for Auger analysis

被引:12
|
作者
Miyatake, Y
Nagamura, T
Hattori, K
Kanemitsu, Y
Daimon, H
机构
[1] Nara Inst Sci & Technol, Grad Sch Mat Sci, Nara 6300192, Japan
[2] UNISOKU Co Ltd, Hirakata, Osaka, Japan
关键词
scanning tunneling microscopy; field emission; Auger electron energy spectroscopy; element analysis;
D O I
10.1143/JJAP.42.4848
中图分类号
O59 [应用物理学];
学科分类号
摘要
A combined system of the Auger electron analysis and the scanning tunneling microscope (STM) has been developed for both topographical observation and elemental analysis of surface. An STM tip works as a field-emission electron source inducing the Auger process. Conventionally used STM tip has a problem for the Auger measurements; Auger electrons from the sample surface are accelerated toward the sample in the strong electric field between the cathode tip and the sample. We constructed a new special tip with a shield electrode around the cathode tip to prevent the bending of the trajectories of Auger electrons. The field-emission election was ejected from the cathode tip, and the special tip played a role of primary electron source for the Auger electron analysis. We detected silicon Auger electrons successfully from a clean Si(111) surface using a cylindrical mirror analyzer that located behind the special tip. This system works for both STM observation and Auger element analysis by exchanging the tip in vacuum.
引用
收藏
页码:4848 / 4851
页数:4
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