共 50 条
- [31] Thermally driven multi-layer actuator for 2D cantilever arrays [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2011, 102 (01): : 61 - 68
- [32] Thermally driven multi-layer actuator for 2D cantilever arrays [J]. Applied Physics A, 2011, 102 : 61 - 68
- [33] Linear Micromechanical Phased Arrays [J]. 2019 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2019, : 174 - 175
- [34] Silica MEMS cantilever arrays [J]. 2015 INTERNATIONAL CONFERENCE ON PHOTONICS IN SWITCHING (PS), 2015, : 333 - 334
- [35] Investigation of electrostatic cantilever-type micromechanical actuator [J]. MECHATRONIC SYSTEMS AND MATERIALS, 2006, 113 : 179 - 184
- [37] Quality factor of thermally excited micromechanical cantilever resonators [J]. Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University, 2002, 36 (04): : 377 - 380
- [38] Resonance-Enhanced Micromechanical Cantilever for Mass Sensing [J]. 2010 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM), 2010,
- [40] Contactless Electromagnetic Switched Interrogation of Micromechanical Cantilever Resonators [J]. EUROSENSORS XXIV CONFERENCE, 2010, 5 : 1031 - 1034