Synthesis of ordered single crystal silicon nanowire arrays

被引:5
|
作者
Zhang, XY
Zhang, LD [1 ]
Meng, GW
Li, GH
Jin-Phillipp, NY
Phillipp, F
机构
[1] Chinese Acad Sci, Inst Solid State Phys, Hefei 230031, Peoples R China
[2] Max Planck Inst Met Res, D-70569 Stuttgart, Germany
关键词
D O I
10.1002/1521-4095(200108)13:16<1238::AID-ADMA1238>3.0.CO;2-3
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Fabrication of ordered single crystal silicon nanowire (SiNW) arrays for potential application in field emitter array (FEA) devices was investigated. A template method for preparing ordered SiNW was carried out in which the pyrolysis of silane within hexagonal closed packed nanochannel alumina (NCA) templates takes place. The samples were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) analysis, transmission electron microscopy (TEM) and high resolution electron microscopy (HREM).
引用
收藏
页码:1238 / 1241
页数:4
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