High-efficiency end-fire 3D optical phased array based on a multi-layer Si3N4/SiO2 platform

被引：16

作者：

Wu, Dachuan ^{[1
]}

Yi, Yasha ^{[1
,2
]}

Zhang, Yuxiao ^{[1
]}

机构：

[1] Univ Michigan, Dept Elect & Comp Engn, Integrated Nano Optoelect Lab, 4901 Evergreen Rd, Dearborn, MI 48128 USA

[2] Univ Michigan, Energy Inst, 2301 Bonisteel Blvd, Ann Arbor, MI 48109 USA

来源：

APPLIED OPTICS | 2020年 / 59卷 / 08期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1364/AO.382962

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Beam-steering devices such as optical phased arrays (OPAs) are key components in the applications of solid-state Lidar and wireless communication. The traditional single-layer OPA results in a significant energy loss due to substrate leakage caused by the downward coupling from the grating coupler structure. In this work, we have investigated a structure based on a multi-layer Si3N4/SiO2 platform that can form a 3D OPA to emit light from the edge of the device with high efficiency; a 2D converged out-coupling beam will be end-fired to the air. High efficiency and wide horizontal beam steering are demonstrated numerically, and the influence of vertical crosstalk, delay length, and number of waveguide layers are discussed, as well as the fabrication feasibility. (C) 2020 Optical Society of America

引用

页码：2489 / 2497

页数：9

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