Control of plasma structure in modified magnetron-typed radio-frequency discharge

Here presented is new technique for controlling the radial profiles of plasma density, which use a modified magnetron-typed (MMT) RF discharge in the low gas pressure regime. The radial profiles of plasma density are controlled by changing the width of RF electrode and the spacing between the magnet rings which are annually wound on the outside surface of the grounded stainless-steel cylinder for the MMT RF discharge. The strength of the magnet is also a important factor for a uniform plasma production. A quite homogeneous plasma with a uniformity within +/-2% is produced over 40 cm in diameter in front of the substrates. The MMT RF discharge is scaled up to produce a uniform plasma of 100 cm in diameter.