Mass Production of Optoelectronic Devices for Solid State Lighting (SSL) by MOCVD

被引：0
|
作者：
Heuken, Michael [1 ]
机构：
[1] AIXTRON AG, D-52072 Aachen, Germany
来源：
AOE 2008: ASIA OPTICAL FIBER COMMUNICATION AND OPTOELECTRONIC EXPOSITION AND CONFERENCE | 2009年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The advances in the optoelectronic market for SSL constantly demand a reduction of the production cost of devices. The Cost of Ownership of the MOCVD production tool is one of the key parameters. We addressed this issue by developing two new reactor configurations for the AIX2800G4 HT Planetary Reactor (R) (11x4 inch) and CRIUS (R) Close-Coupled-Showerhead (CCS) (12x3 inch) platforms. (C) 2008 Optical Society of America
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页数：3
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