Aluminium press-on contacts for glass-to-silicon anodic bonding

被引：5
|
作者：
Kadar, Z
Bossche, A
Mollinger, J
机构：
[1] Delft University of Technology, Electron. Instrumentation Laboratory, 2600 GA Delft
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 52卷 / 1-3期
关键词：
aluminium; anodic bonding; press-on contacts;
D O I：
10.1016/0924-4247(96)80141-5
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper a glass-to-silicon anodic bonding experiment is described. A test chip has been designed and realized containing special structures to study the performance of the different types of press-on contacts, which are realized by forming metal patterns at the same position on the silicon and glass surfaces. The other goal of the experiment is to examine the step coverage of the aluminium patterns on glass.
引用
收藏
页码：151 / 155
页数：5
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