Precision carbon nanotube tip for critical dimension measurement with atomic force microscope

Precision carbon nanotube (P-CNT) tip for atomic force microscope (AFM) was fabricated where CNT orientation and length is controlled within the precision of 1 degree and 300 nm, respectively. The orientation, diameter and length of CNT tip are crucial factors for faithful profiling of surface patterns. With a nano-manipulation while viewing scanning electron microscope live image followed by focused ion beam process, P-CNT tip could be made. P-CNT tip acts as a normal CNT tip without FIB process. Further it maintains the elasticity. P-CNT tip can, in principle, enter the trench or hole less than 70 nm, which is impossible with the current state-of-the-art silicon tip for CD-AFM. Flaring the CNT end would potentially make possible the AFM-based sub-70 nm CD metrology for these structures.