Direct laser writing of whispering gallery microcavities by two-photon polymerization

被引：68
|
作者：
Liu, Zhao-Pei [1 ]
Li, Yan
Xiao, Yun-Feng
Li, Bei-Bei
Jiang, Xue-Feng
Qin, Yi
Feng, Xiao-Bo
Yang, Hong
Gong, Qihuang
机构：
[1] Peking Univ, Dept Phys, Beijing 100871, Peoples R China
来源：
APPLIED PHYSICS LETTERS | 2010年 / 97卷 / 21期
基金：
中国国家自然科学基金;
关键词：
MICROFABRICATION; FABRICATION; RESONATORS; TEMPLATES;
D O I：
10.1063/1.3517493
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We demonstrate that high-Q polymer whispering gallery microcavities can be directly written by the two-photon polymerization of zirconium/silicon hybrid sol-gel, benefiting from the high spatial resolution and three-dimensional nature of this direct laser writing technique. The quality factors of the fabricated whispering gallery microcavities are up to 1.48 x 10(5) limited by the material absorption. The surface roughness is less than 12 nm. This opens the way to fabricate intricate three-dimensional microcavities for the fundamental and applied physics research based on optical resonators. (C) 2010 American Institute of Physics. [doi:10.1063/1.3517493]
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页数：3
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