Massively parallel femtosecond laser processing

被引：44
|
作者：
Hasegawa, Satoshi [1 ]
Ito, Haruyasu [2 ]
Toyoda, Haruyoshi [2 ]
Hayasaki, Yoshio [1 ]
机构：
[1] Utsunomiya Univ, CORE, 7-1-2 Yoto, Utsunomiya, Tochigi 3218585, Japan
[2] Hamamatsu Photon KK, Hamakita Ku, 5000 Hirakuchi, Hamamatsu, Shizuoka 4348601, Japan
来源：
OPTICS EXPRESS | 2016年 / 24卷 / 16期
关键词：
SPATIAL LIGHT-MODULATOR; ROTATION-ANGLE METHOD; 2-PHOTON POLYMERIZATION; FREQUENCY RESPONSE; COMPENSATION; FABRICATION; HOLOGRAM; SILICON; OPTIMIZATION; DEVICES;
D O I：
10.1364/OE.24.018513
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Massively parallel femtosecond laser processing with more than 1000 beams was demonstrated. Parallel beams were generated by a computer-generated hologram (CGH) displayed on a spatial light modulator (SLM). The key to this technique is to optimize the CGH in the laser processing system using a scheme called in-system optimization. It was analytically demonstrated that the number of beams is determined by the horizontal number of pixels in the SLM N-SLM that is imaged at the pupil plane of an objective lens and a distance parameter p(d) obtained by dividing the distance between adjacent beams by the diffraction-limited beam diameter. A performance limitation of parallel laser processing in our system was estimated at N-SLM of 250 and p(d) of 7.0. Based on these parameters, the maximum number of beams in a hexagonal close-packed structure was calculated to be 1189 by using an analytical equation. (C) 2016 Optical Society of America
引用
收藏
页码：18513 / 18524
页数：12
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