Ultra-low dark count InGaAs/InP single photon avalanche diode

被引:4
|
作者
Li Bin [1 ]
Niu Yuxiu [1 ]
Feng Yinde [1 ]
Chen Xiaomei [1 ]
机构
[1] Accelink Technol Co Ltd, Wuhan 430000, Peoples R China
关键词
A; DETECTOR;
D O I
10.1007/s11801-022-2036-3
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A low noise InGaAs/InP single photon avalanche diode (SPAD) is demonstrated. The device is based on planar type separate absorption, grading, charge and multiplication structure. Relying on reasonably designed device structure and low-damage Zn diffusion technology, excellent low-noise performance is achieved. Due to its importance, the physical mechanism of dark count is analyzed through performance characterization at different temperatures. The device can achieve 20% single photon detection efficiency and 320 Hz dark count rate (DCR) with a low after pulsing probability of 0.57% at 233 K.
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页码:647 / 650
页数:4
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