A 2-Axis Electrothermal MEMS Micro-Scanner With Torsional Beam

被引：0
|
作者：
Tanguy, Quentin A. A. [1 ,2 ]
Duan, Can [1 ]
Wang, Wei [1 ]
Xie, Huikai [1 ]
Bargiel, Sylwester [2 ]
Struk, Przemyslaw [2 ]
Lutz, Philippe [2 ]
Gorecki, Christophe [2 ]
机构：
[1] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL 32611 USA
[2] Univ Bourgogne Franche Comte, Inst FEMTO ST, Dept MN2S, Besancon, France
来源：
2016 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2016年
关键词：
MOEMS; electrothermal micromirror; torsion beam; optical coherence tomography; dry photoresist lamination;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper we introduce a 2-axis MEMS micro scanner with large scanning range of frame (32) and mirror (220) using a compact and optimized electrothermal bimorph actuator and torsional beams to tip and tilt a dual-reflective mirror plate.
引用
收藏
页数：2
相关论文
共 50 条
  • [1] Design and Fabrication of a 2-Axis Electrothermal MEMS Micro-Scanner for Optical Coherence Tomography
    Tanguy, Quentin A. A.
    Bargiel, Sylwester
    Xie, Huikai
    Passilly, Nicolas
    Barthes, Magali
    Gaiffe, Olivier
    Rutkowski, Jaroslaw
    Lutz, Philippe
    Gorecki, Christophe
    [J]. MICROMACHINES, 2017, 8 (05)
  • [2] Thermal dynamics of 2-axis electrothermal MEMS micromirrors
    Donnachie, Mark
    Uttamchandani, Deepak
    Bauer, Ralf
    [J]. 2019 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2019, : 228 - 229
  • [3] 2-Axis MEMS Scanner for a Laser Range Finder
    Aoyagi, I.
    Shimaoka, K.
    Kato, S.
    Makishi, W.
    Kawai, Y.
    Tanaka, S.
    Ono, T.
    Esashi, M.
    Hane, K.
    [J]. OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS, 2011, : 39 - +
  • [4] A Compact 3D LiDAR Based on an Electrothermal 2-axis MEMS Scanner for Small UAV
    Wang, Dingkang
    Strassle, Stephan
    Stainsby, Aaron
    Bai, Yunkai
    Koppal, Sanjeev
    Xie, Huikai
    [J]. LASER RADAR TECHNOLOGY AND APPLICATIONS XXIII, 2018, 10636
  • [5] AN ELECTROSTATIC IN-PLANE ROTATIONAL MEMS MICRO-SCANNER
    Mu, Xiaojing
    Zhou, Guangya
    Du, Yu
    Kumar, A. Sentil
    Chau, Fook Siong
    Yu, Hongbin
    Tsai, Julius Ming-Lin
    [J]. 2012 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2012, : 240 - +
  • [6] Study on Dynamic Scanning Performance of a 2-axis MEMS Electrothermal Micromirror
    Liu, KaiLi
    Tang, YongMing
    Lan, ShuMing
    Xie, HuiKai
    [J]. PROCEEDINGS OF CHINA DISPLAY/ASIA DISPLAY 2011, 2011, : 775 - 777
  • [7] Development of a photoacoustic handheld probe using 2-axis MEMS scanner
    Park, Kyungjin
    Kim, Jin Young
    Lee, Changho
    Lim, Geunbae
    Kim, Chulhong
    [J]. PHOTONS PLUS ULTRASOUND: IMAGING AND SENSING 2017, 2017, 10064
  • [8] Real-time Lissajous imaging with a low-voltage 2-axis MEMS scanner based on electrothermal actuation
    Tanguy, Quentin A. A.
    Gaiffe, Olivier
    Passilly, Nicolas
    Cote, Jean-Marc
    Cabodevila, Gonzalo
    Bargiel, Sylwester
    Lutz, Philippe
    Xie, Huikai
    Gorecki, Christophe
    [J]. OPTICS EXPRESS, 2020, 28 (06): : 8512 - 8527
  • [9] An in vivo two photon fluorescence endomicroscopic probe based on a 2-axis electrothermal MEMS mirror
    Mehidine, H.
    Pinot, L.
    Li, M.
    Bouvet, F.
    Esnault, C.
    Xie, H.
    Abi Haidar, D.
    [J]. MEDICAL LASER APPLICATIONS AND LASER-TISSUE INTERACTIONS IX, 2019, 11079
  • [10] A Large Aperture 2-Axis Electrothermal MEMS Mirror for Compact 3D LiDAR
    Wang, Dingkang
    Watkins, Connor
    Aradhya, Medini
    Koppal, Sanjeev
    Xie, Huikai
    [J]. 2019 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2019, : 180 - 181
12345