2-Axis MEMS Scanner for a Laser Range Finder

被引：0
|
作者：
Aoyagi, I. [1 ]
Shimaoka, K. [1 ]
Kato, S. [1 ]
Makishi, W. [2 ]
Kawai, Y. [2 ]
Tanaka, S. [2 ]
Ono, T. [2 ]
Esashi, M. [2 ]
Hane, K. [2 ]
机构：
[1] Toyota Cent Res & Dev Labs Inc, MEMS Device Lab, Power Elect Res Div, Toyota, Aichi, Japan
[2] Tohoku Univ, Miyazaki, Japan
来源：
OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2011年
关键词：
component; MEMS; scanner; Laser range finder;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A moving-magnet-type 2-axis MEMS scanner with a rotation angle detector has been developed. The fabricated MEMS scanner demonstrated a raster scan and 2-axis rotation angles detection with one Hall sensor.
引用
收藏
页码：39 / +
页数：2
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