FeZrN films: Role of dc magnetron sputtering conditions in the formation of their elemental and phase compositions

被引：6

作者：

Sheftel, E. N. ^{[1
]}

Tedzhetov, V. A. ^{[1
]}

Harin, E., V ^{[1
]}

Usmanova, G. Sh ^{[1
]}

Dyachkov, A. L. ^{[2
]}

机构：

[1] Russian Acad Sci, Baikov Inst Met & Mat Sci, Leninsky Prospect 49, Moscow 119334, Russia

[2] Alcont Ltd, Yakov Gunin St 1, Dolgoprudnyi 141703, Moscow Region, Russia

来源：

THIN SOLID FILMS | 2020年 / 698卷

关键词：

Fe-Zr-N films; Magnetron sputtering; Magnetic materials; Nanocrystalline materials; X-ray diffraction; Impurity elements; Phase composition; alpha Fe-based solid solution; X-RAY-DIFFRACTION; NANOCRYSTALLINE FILMS; THERMAL-STABILITY; ZR; EVOLUTION; ALLOYS;

D O I：

10.1016/j.tsf.2020.137876

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The phase-structural state of Fe, Fe(1-x)Nx, Fe(1-y)Zry, and Fe(90-z)Zr10Nz films obtained by reactive magnetron sputtering under different energy and gas-atmosphere conditions was studied. It is shown that impurity elements (N, O) absorbed by the films during the deposition process along with the principal elements (Fe, Zr, N) participate in the formation of the phase composition and structure of the films. The phenomena of the formation of supersaturated bcc Fe(N) and/or bcc Fe(Zr) solid solutions and high-temperature modifications (which are non-equilibrium at room temperature) of the bcc Zr and fcc ZrO2 phases in the films are substantiated by the fundamental concepts of the metal physics.

引用

页数：8

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