Gallium-doped sol-gel glass waveguides on Si substrates by SC-RTA

被引：2

作者：

Schneider, VM ^{[1
]}

Syms, RRA ^{[1
]}

机构：

[1] Univ London Imperial Coll Sci Technol & Med, Dept Elect & Elect Engn, London SW7 2BT, England

来源：

ELECTRONICS LETTERS | 1998年 / 34卷 / 19期

关键词：

D O I：

10.1049/el:19981238

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The fabrication of silica-on-silicon channel guides by spin-coating and rapid thermal annealing (SC-RTA) of sol-gel glass doped with gallium, germanium and phosphorus oxides is described, and methods of depositing clear, crack-free films are discussed. Low loss is only obtained for lightly-doped guides with controlled process temperatures.

引用

页码：1849 / 1850

页数：2

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