Nano-scale ablation with soft x-ray lasers

被引：1

作者：

Brizuela, Fernando ^{[1
]}

Bravo, Herman ^{[1
]}

Vaschenko, Georgiy ^{[1
]}

Berrill, Mark ^{[1
]}

Langdon, Benjamin ^{[1
]}

Menoni, Carmen S. ^{[1
]}

Hemberg, Oscar ^{[2
]}

Bloom, Scott ^{[2
]}

Chao, Weilun ^{[3
,4
]}

Anderson, Erik H. ^{[3
,4
]}

Attwood, David T. ^{[3
,4
]}

Rocca, Jorge J. ^{[1
]}

机构：

[1] Colorado State Univ, NSF ERC Extreme Ultraviolet Sci & Technol, Ft Collins, CO 80523 USA

[2] BJMAR Technol Inc, San Diego, CA 92127 USA

[3] Lawrence Berkeley Natl Lab, Ctr Xray Opt, NSF ERC Extreme Ultraviolet Sci & Technol, Berkeley, CA 94720 USA

[4] Univ Calif Berkeley, Berkeley, CA 94720 USA

来源：

SOFT X-RAY LASERS AND APPLICATIONS VII | 2007年 / 6702卷

基金：

美国国家科学基金会;

关键词：

ablation; soft x-ray laser; spectroscopy;

D O I：

10.1117/12.733401

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We have demonstrated ablation of holes with diameter as small as 82 nm in polymethyl methacrylate (PMMA) by focusing the output of a capillary discharge soft x-ay laser with a Fresnel zone plate. We also report the first demonstration of laser induced breakdown spectroscopy with soft x-ray laser light.

引用

页数：7

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