Millisecond laser machining of transparent materials assisted by nanosecond laser

被引：33

作者：

Pan, Yunxiang ^{[1
]}

Zhang, Hongchao ^{[1
]}

Chen, Jun ^{[1
]}

Han, Bing ^{[2
]}

Shen, Zhonghua ^{[1
]}

Lu, Jian ^{[1
]}

Ni, Xiaowu ^{[1
]}

机构：

[1] Nanjing Univ Sci & Technol, Sch Sci, Nanjing 210094, Jiangsu, Peoples R China

[2] Nanjing Univ Sci & Technol, Adv Launching Coinnovat Ctr, Laser Mat Interact Lab, Nanjing 210094, Jiangsu, Peoples R China

来源：

OPTICS EXPRESS | 2015年 / 23卷 / 02期

关键词：

INDUCED DAMAGE; OPTICAL-MATERIALS; LONG-PULSE; THIN-FILM; FEMTOSECOND; SURFACE; SILICA; SINGLE; CRACKS; BULK;

D O I：

10.1364/OE.23.000765

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new form of double pulse composed of a nanosecond laser and a millisecond laser is proposed for laser machining transparent materials. To evaluate its advantages and disadvantages, experimental investigations are carried out and the corresponding results are compared with those of single millisecond laser. The mechanism is discussed from two aspects: material defects and effects of modifications induced by nanosecond laser on thermal stress field during millisecond laser irradiation. It is shown that the modifications of the sample generated by nanosecond laser improves the processing efficiency of subsequent millisecond laser, while limits the eventual size of modified region. (C) 2015 Optical Society of America

引用

页码：765 / 775

页数：11

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