MEMS Rogowski coil current sensor with spiral return coil

We have developed a MEMS Rogowski coil current sensor with spiral return coil. The Rogowski coil is formed on a silicon substrate clockwise and counterclockwise from the edges, for current detection and external magnetic noise compensation (device size 10 x 10 x 0.3 mm(3), spiral coil 135 turns, via diameter 100 mu m). When the slew rate (di/dt) was kept constant at 10 A/mu s, and the current was changed by 5 A up to 40 A, MEMS Rogowski coil could detect current linearly. When the slew rate was changed by 10 A/mu s up to 100 A/mu s, it was found that the MEMS Rogowski coil could detect current almost linearly following the reference sensor. Hence, external noise compensation by the return coil has been confirmed.