Fault simulation for typical structures in the MEMS gyro

被引：0

作者：

Liu, Fengli ^{[1
]}

Gao, Lianxing ^{[1
]}

Hao, Yongping ^{[1
,2
]}

Zengz, Pengfei ^{[1
,2
]}

机构：

[1] Shenyang Agr Univ, Engn Inst, Shenyang, Liaoning, Peoples R China

[2] Shenyang Ligong Univ, R&D Ctr CAD, CAM Technol, Shenyang, Liaoning, Peoples R China

来源：

2007 IEEE INTERNATIONAL CONFERENCE ON MECHATRONICS AND AUTOMATION, VOLS I-V, CONFERENCE PROCEEDINGS | 2007年

关键词：

MEMS; reliability; simulation; typical structures;

D O I：

10.1109/ICMA.2007.4304048

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

The fault in MEMS gyro always cause huge damage because it is often used in critical system. Failure mode and effect analysis can predict failure modes at an early stage of the MEMS gyro design. MEMS gyro is mainly composed of typical structures such as comb diver, parallel plate capacitor and cantilever. So this analysis is restricted to fault simulation in system level and components level for the typical structures and relies on integrating qualitative failure analysis and quantitative fault simulation.

引用

页码：3056 / 3060

页数：5

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