Analysis and Design of a MEMS DC/DC Converter

被引：1

作者：

Qu, Furong ^{[1
]}

Nie, Mengyan ^{[2
]}

Liu, Yu ^{[3
]}

Ou, Yi ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China

[2] Univ Southampton, nCATS, Engn Sci, Southampton SO17 1BJ, Hants, England

[3] Chongqing Univ Posts & Telecommun, Dept Optoelect Engn, Chongqing 400065, Peoples R China

来源：

IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING | 2015年 / 10卷 / 03期

基金：

中国国家自然科学基金;

关键词：

MEMS; DC; energy conversion; vibration; electrostatic;

D O I：

10.1002/tee.22090

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the analysis and simulation of a microelectromechanical system (MEMS) DC/DC converter based on vibration-to-electric energy conversion. The device transfers and accumulates the mechanical energy from ambient vibration via a variable capacitor. After the key parameters of the device are carefully discussed, the dynamics analysis is given based on the differential equation of the system. The approach provided in this paper is very helpful in designing and essentially understanding the MEMS DC/DC converter with high performance. (c) 2014 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

引用

页码：340 / 344

页数：5

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