Spectrum-based Model Reduction of Rapid Thermal Processing System

In order to study the temperature distribution on the wafer in a rapid thermal processing system, we develop a reduced model of the dynamic based on the spectrum of the system operator. The dominant modes of the system are extracted through the analysis of the spectrum. Galerkin's method is utilized to construct the reduced model of the system with the dominant modes as the trial functions. Simulations are performed by comparing the high-order model with the proposed reduced model. Simulation results show that the proposed reduced model has relatively small order but the same ability to model the process.