Testing of MEMS-based microsystems

被引：8
|
作者：
Kerkhoff, HG [1 ]
机构：
[1] MESA, Testable Design & Testing Nanosyst, NL-7500 AE Enschede, Netherlands
来源：
ETS 2005:10TH IEEE EUROPEAN TEST SYMPOSIUM, PROCEEDINGS | 2005年
关键词：
D O I：
10.1109/ETS.2005.40
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
The introduction of MEMS in microsystems is progressing rapidly. The high-volume testing of these multi-domain systems are often relatively cumbersome in comparison with pure electrical tests, because of non-electrical stimuli and/or response. It requires currently custom-made test set-up. Also the quality of tests is difficult to quantify. Hence, structural tests seem more appropriate, but this requires a lot of research and new approaches.
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页码：223 / 228
页数：6
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