Sputtered-sliced fabrication of kinoform zone plate for hard X-ray focusing

被引：1
|
作者：
Yasumoto, M
Tamura, S
Kamijo, N
Suzuki, Y
Awaji, M
Takeuchi, A
Takano, H
机构：
[1] AIST, Photon Res Inst, Tsukuba, Ibaraki 3058568, Japan
[2] AIST, Photon Res Inst, Ikeda, Osaka 5638577, Japan
[3] Kansai Med Univ, Hirakata, Osaka 5731136, Japan
[4] Japan Synchrotron Radiat Res Inst SPring 8, Mikazuki, Hyogo 6795198, Japan
来源：
JOURNAL DE PHYSIQUE IV | 2003年 / 104卷
关键词：
D O I：
10.1051/jp4:200300058
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
We are planning to develop a kinoform zone plate (ZP) for hard X-ray using a sputtered-sliced (SS) method with two materials (Cu/Al). The SS kinoform ZP is composed of a Cu/Al multilayer that is based on radial modulation of the refractive indices of deposition materials. The X-ray through the zones interferes constructively at the focal point. The kinoform ZP, therefore, has an advantage of high focusing efficiency. According to the our theoretical calculation, the focusing efficiency of the Cu/Al kinoform PZP is up to 86% in the 0similar to30 keV X-ray energy region, while one of the conventional Cu/Al multilayer Fresnel zone plate is up to 38%.
引用
收藏
页码：189 / 192
页数：4
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