Efficient and Optimal Scheduling of Time-constrained Hybrid Multi-cluster Tools in Semiconductor Industry

被引：0
|
作者：
Yang, Fajun
Wu, Naiqi
Qiao, Yan
Zhou, Mengchu
机构：
来源：
2016 IEEE 13TH INTERNATIONAL CONFERENCE ON NETWORKING, SENSING, AND CONTROL (ICNSC) | 2016年
关键词：
D O I：
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中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
SaA1.2
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页数：1
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