In-plane microelectromechanical resonator with integrated Fabry-Perot cavity

被引：26
|
作者：
Pruessner, Marcel W. [1 ]
Stievater, Todd H. [2 ]
Rabinovich, William S. [2 ]
机构：
[1] SFA Inc, Crofton, MD 21114 USA
[2] USN, Res Lab, Washington, DC 20375 USA
来源：
APPLIED PHYSICS LETTERS | 2008年 / 92卷 / 08期
关键词：
D O I：
10.1063/1.2883874
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A silicon-on-insulator in-plane microelectromechanical resonator coupled to a high-Q (Q approximate to 4,200), high finesse (F-Max = 265) optical Fabry-Perot microcavity is presented. The cavity utilizes high reflectance dry-etched silicon/air distributed Bragg reflectors. By suspending one of the Bragg mirrors to a microbridge resonator, the mirror can be displaced and the cavity is tuned. Using electrostatic actuation, bidirectional cavity tuning from -12.1 to + 17.0 nm (29.1 nm total range) is demonstrated near 1601 nm wavelength. The device also enables measurement of thermal-mechanical noise with sensitivity better than 10 fm/Hz(1/2) and may find application in high resolution sensors. (C) 2008 American Institute of Physics.
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页数：3
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